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Investigation of Hydridosilsesquioxane-Based Silicon...

Investigation of Hydridosilsesquioxane-Based Silicon Oxide Deposition on Si(111)-7ยด7.

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K.S. Schneider, T. M. Owens, K. T. Nicholson, B. J. Ludwig, J. N. Greeley, B. G. Orr, M. M. Banaszak Holl.
Langmuir
2002,
18,
6233-6241.