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Nucleation of chemical vapor deposited silicon nitride...

Nucleation of chemical vapor deposited silicon nitride on silicon dioxide.

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M. Copel, P. R. Varekamp, D. W. Kisker, F. R. McFeely, K. E. Litz, M. M. Banaszak Holl.
Appl. Phys. Lett.
1999,
74,
1830-1832.