You Are Here: > Low temperature selective area chemical vapor deposition...

Low temperature selective area chemical vapor deposition...

Low temperature selective area chemical vapor deposition of gold films: growth and characterization.
P. F. Seidler, S. P. Kowalczyk, M. M. Banaszak Holl, J. J. Yurkas, M. H. Norcott, F. R. McFeely.
Mat. Res. Soc. Symp. Proc.
1993,
282,
359.
See: